AG ASSOCIATE AG 8108

AG ASSOCIATE AG 8108
AS-IS AND REFURBISHED
RTP
WAFER SIZE: 150MM
AVAILABLE IN WAREHOUSE
序号 名称 配置信息
1 主机 4,6 inch
2 石英架(TRAY),
满足6英寸wafer传送作业 OK
3 机械手及控制器 OK
4 交流电源 OK
5 直流电源 OK
6 STDBUS控制盒 OK
7 高温计测量温控系统 OK
8 高温计和专用水冷机 OK
9 RTP专用控制软件 OK
10 控制电器及电缆若干 OK
11 温度校准片 1PCS
12 温度校准工具 高温计和欧米伽表
13 找中心单元 OK
14 气路 6-gas channel with 5 MFCs
15 Cooling station OK

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AG ASSOCIATE AG 8108

AG ASSOCIATE AG 8108

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