Description

HITACHI S-7800H Critical Dimension Scanning Electron Microscope (CD-SEM), 4″-8″
Automatic cassette to cassette wafer loading
Resolution: 5 nm at 1 kV
Throughput: 5 Wafers/Hour

Stage movable range:
X: 0 ~ 200 mm
Y: 0 ~ 200 mm
Z: 4 ~ 12 mm
R: 0 ~ 360°
T: 0 ~ 60°

Chiller
Operations manual included
1998 vintage.