HITACHI S 5000
SCANNING ELECTRON MICROSCOPE (SEM)
Resolution:
Accelerating voltage: 30 kV
Working distance: 4 mm (0.6 nm)
Accelerating voltage: 1 kV
Working distance: 1.5 mm (2.5 nm)
Magnification:
High magnification mode: 500x-10,00,000x
Low magnification mode: 30x-2,000x
Electron optics:
Electron gun: Cold cathode field emission type
Extracting voltage (Vext): 0-6.5 kV
Accelerating voltage (Vacc): 0.5-30 kV (In 100 V steps)
Lens:
3-Stage electromagnetic lens
Reduction type
Objective lens aperture:
Movable aperture
Self cleaning thin aperture
Astigmatism correction coil (Stigmator): Electromagnetic type
Scanning coil: 2-Stage electromagnetic deflection type
Specimen stage:
X Traverse: ±3.5 mm
Y Traverse: ±2 mm
Z Traverse: ±0.3 mm
Tilt: ±15°
Specimen size: 9.5 mm x 5 mm x 2.4 mm
Display unit:
Display type: CRT Monitor
Photo CRT Option: Ultra high resolution type
Scanning modes:
Normal scan
Reduced area scan
Line scan
Sport analysis
Average concentration analysis
Scanning speeds:
TV (640 x 480 Pixels display: 25 / 30 Flames/s)
Fast (Full screen display: 25 / 30 Flames/s)
Slow (Full screen display: 1/0.9, 4/3.3, 20/16, 40/32, 80/64 Flame/s)
640 x 480 Pixels display: 0.5/0.4, 2/1.7, 10/8, 20/16, 40/32 Flame/s
Evacuation system:
Type: Fully automatic pneumatic valve system
Ultimate vacuum levels:
Specimen chamber: 7×10^-4 Pa
Electron gun chamber :
IP-1: 1×10^-7 Pa
IP-2: 2×10^-6 Pa
IP-3: 7×10^-5 Pa
Vacuum pumps:
Electron optical system: (3) Ion pumps
Specimen chamber: Turbo molecular pump
(2) Oil rotary pumps
Compressor: Oil less type compressor
Warning devices:
Power failure
Cooling water interruption
Inadequate vacuum
Column unit:
IP1, IP2, IP3
MV1, MV2, MV3, MV4
Pi1, Pi2, Pe
HV Cable
Aperture assembly
TMP (STP301H)
Power rack:
DC Power supply unit
OBJ Lens power supply unit
SEIKO SEIKI STP-301H Controller
Ion pump power supply
Includes:
(2) Rotary pumps
Transformer
Evac trom
Local power supply
Interface
1996 vintage.